Positioning System of Infrared Sensors Based on ZnO Thin Film
Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/23/15/6818 |
| _version_ | 1797586023735099392 |
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| author | Chia-Yu Tsai Yan-Wen Lin Hong-Ming Ku Chia-Yen Lee |
| author_facet | Chia-Yu Tsai Yan-Wen Lin Hong-Ming Ku Chia-Yen Lee |
| author_sort | Chia-Yu Tsai |
| collection | DOAJ |
| description | Infrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 °C for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 µm over a sensing range of 30 cm. The results show that the voltage signal varies as an inverse exponential function of the distance. A positioning system based on three infrared sensors is implemented in LabVIEW. It is shown that the position estimates obtained using the proposed system are in excellent agreement with the actual locations. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors. |
| first_indexed | 2024-03-11T00:16:25Z |
| format | Article |
| id | doaj.art-5a0cc4b072044a23b0f69d18e9868c98 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-11T00:16:25Z |
| publishDate | 2023-07-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-5a0cc4b072044a23b0f69d18e9868c982023-11-18T23:34:52ZengMDPI AGSensors1424-82202023-07-012315681810.3390/s23156818Positioning System of Infrared Sensors Based on ZnO Thin FilmChia-Yu Tsai0Yan-Wen Lin1Hong-Ming Ku2Chia-Yen Lee3Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanDepartment of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanDepartment of Chemical Engineering, King Mongkut’s University of Technology Thonburi, Bangkok 10140, ThailandDepartment of Materials Engineering, National Pingtung University of Science and Technology, Pingtung 912, TaiwanInfrared sensors incorporating suspended zinc oxide (ZnO) pyroelectric films and thermally insulated silicon substrates are fabricated using conventional MEMS-based thin-film deposition, photolithography, and etching techniques. The responsivity of the pyroelectric film is improved via annealing at 500 °C for 4 h. The voltage response of the fabricated sensors is evaluated experimentally for a substrate thickness of 1 µm over a sensing range of 30 cm. The results show that the voltage signal varies as an inverse exponential function of the distance. A positioning system based on three infrared sensors is implemented in LabVIEW. It is shown that the position estimates obtained using the proposed system are in excellent agreement with the actual locations. In general, the results presented in this study provide a useful source of reference for the further development of MEMS-based pyroelectric infrared sensors.https://www.mdpi.com/1424-8220/23/15/6818MEMSpositioning systempyroelectric infrared sensorszinc oxide |
| spellingShingle | Chia-Yu Tsai Yan-Wen Lin Hong-Ming Ku Chia-Yen Lee Positioning System of Infrared Sensors Based on ZnO Thin Film Sensors MEMS positioning system pyroelectric infrared sensors zinc oxide |
| title | Positioning System of Infrared Sensors Based on ZnO Thin Film |
| title_full | Positioning System of Infrared Sensors Based on ZnO Thin Film |
| title_fullStr | Positioning System of Infrared Sensors Based on ZnO Thin Film |
| title_full_unstemmed | Positioning System of Infrared Sensors Based on ZnO Thin Film |
| title_short | Positioning System of Infrared Sensors Based on ZnO Thin Film |
| title_sort | positioning system of infrared sensors based on zno thin film |
| topic | MEMS positioning system pyroelectric infrared sensors zinc oxide |
| url | https://www.mdpi.com/1424-8220/23/15/6818 |
| work_keys_str_mv | AT chiayutsai positioningsystemofinfraredsensorsbasedonznothinfilm AT yanwenlin positioningsystemofinfraredsensorsbasedonznothinfilm AT hongmingku positioningsystemofinfraredsensorsbasedonznothinfilm AT chiayenlee positioningsystemofinfraredsensorsbasedonznothinfilm |