Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements
In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a micro...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/6/632 |
| _version_ | 1797532118839984128 |
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| author | Yuan Cao Julia Floehr Sven Ingebrandt Uwe Schnakenberg |
| author_facet | Yuan Cao Julia Floehr Sven Ingebrandt Uwe Schnakenberg |
| author_sort | Yuan Cao |
| collection | DOAJ |
| description | In micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a microfluidic chip with embedded, vertically arranged microelectrodes for electrical impedance measurements. To trap and fix the object under test to the electrodes, an aperture is formed in the center of the ring-shaped electrodes in combination with a microfluidic suction channel underneath. In a proof-of-concept, the setup is characterized by electrical impedance measurements with polystyrene and ZrO<sub>2</sub> spheres. The electrical impedance is most sensitive at approximately 2 kHz, and its magnitudes reveal around 200% higher values when a sphere is trapped. The magnitude values depend on the sizes of the spheres. Electrical equivalent circuits are applied to simulate the experimental results with a close match. |
| first_indexed | 2024-03-10T10:54:34Z |
| format | Article |
| id | doaj.art-5a0f9d25d8e24fc79701eb16ee850b8d |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T10:54:34Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-5a0f9d25d8e24fc79701eb16ee850b8d2023-11-21T21:59:00ZengMDPI AGMicromachines2072-666X2021-05-0112663210.3390/mi12060632Dry Film Resist Laminated Microfluidic System for Electrical Impedance MeasurementsYuan Cao0Julia Floehr1Sven Ingebrandt2Uwe Schnakenberg3Institute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 24, 52074 Aachen, GermanyHelmholtz-Institute for Biomedical Engineering, RWTH Aachen University Hospital, Pauwelsstraße 30, 52074 Aachen, GermanyInstitute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 24, 52074 Aachen, GermanyInstitute of Materials in Electrical Engineering 1, RWTH Aachen University, Sommerfeldstraße 24, 52074 Aachen, GermanyIn micro-electrical-mechanical systems (MEMS), thick structures with high aspect ratios are often required. Dry film photoresist (DFR) in various thicknesses can be easily laminated and patterned using standard UV lithography. Here, we present a three-level DFR lamination process of SUEX for a microfluidic chip with embedded, vertically arranged microelectrodes for electrical impedance measurements. To trap and fix the object under test to the electrodes, an aperture is formed in the center of the ring-shaped electrodes in combination with a microfluidic suction channel underneath. In a proof-of-concept, the setup is characterized by electrical impedance measurements with polystyrene and ZrO<sub>2</sub> spheres. The electrical impedance is most sensitive at approximately 2 kHz, and its magnitudes reveal around 200% higher values when a sphere is trapped. The magnitude values depend on the sizes of the spheres. Electrical equivalent circuits are applied to simulate the experimental results with a close match.https://www.mdpi.com/2072-666X/12/6/632dry film resistSU-8SUEXelectrical impedance spectroscopymicroelectrodemicrofluidic |
| spellingShingle | Yuan Cao Julia Floehr Sven Ingebrandt Uwe Schnakenberg Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements Micromachines dry film resist SU-8 SUEX electrical impedance spectroscopy microelectrode microfluidic |
| title | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
| title_full | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
| title_fullStr | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
| title_full_unstemmed | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
| title_short | Dry Film Resist Laminated Microfluidic System for Electrical Impedance Measurements |
| title_sort | dry film resist laminated microfluidic system for electrical impedance measurements |
| topic | dry film resist SU-8 SUEX electrical impedance spectroscopy microelectrode microfluidic |
| url | https://www.mdpi.com/2072-666X/12/6/632 |
| work_keys_str_mv | AT yuancao dryfilmresistlaminatedmicrofluidicsystemforelectricalimpedancemeasurements AT juliafloehr dryfilmresistlaminatedmicrofluidicsystemforelectricalimpedancemeasurements AT sveningebrandt dryfilmresistlaminatedmicrofluidicsystemforelectricalimpedancemeasurements AT uweschnakenberg dryfilmresistlaminatedmicrofluidicsystemforelectricalimpedancemeasurements |