Multilayer and Thin Transparent Conducting Oxide Fabrication Using RF Magnetron Sputtering on Flexible Substrates

Multilayer and Thin Transparent Conducting Oxide Fabrication Using RF Magnetron Sputtering on Flexible Substrates

Abstract In this work, the fabrication of multilayered transparent conductive oxides (TCOs), ZnO–Ag–ZnO (Z-TCO) and AZO–Ag–AZO (AZ-TCO), on flexible polyethylene terephthalate (PET) substrate using radio frequency (RF) magnetron sputtering is reported, with the optical and electrical prope...

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Bibliographic Details
Main Authors: Sanjay Kumar Swami, Bidyut Barman, Anuj Kumar, Viresh Dutta
Format: Article
Language:English
Published: Georg Thieme Verlag 2023-01-01
Series:Organic Materials
Subjects:
flexible substrates
multilayered tco
magnetron sputtering
electrical resistivity
figure of merit
Online Access:http://www.thieme-connect.de/DOI/DOI?10.1055/s-0042-1757982

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