Micro 3D printing of a functional MEMS accelerometer

Micro 3D printing of a functional MEMS accelerometer

Abstract Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconductor manufacturing techniques. Howev...

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Bibliographic Details
Main Authors: Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, Frank Niklaus
Format: Article
Language:English
Published: Nature Publishing Group 2022-09-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-022-00440-9

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