Micro 3D printing of a functional MEMS accelerometer
Abstract Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconductor manufacturing techniques. Howev...
Main Authors: | Simone Pagliano, David E. Marschner, Damien Maillard, Nils Ehrmann, Göran Stemme, Stefan Braun, Luis Guillermo Villanueva, Frank Niklaus |
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Format: | Article |
Language: | English |
Published: |
Nature Publishing Group
2022-09-01
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Series: | Microsystems & Nanoengineering |
Online Access: | https://doi.org/10.1038/s41378-022-00440-9 |
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