Study of Silicon Nitride Inner Spacer Formation in Process of Gate-all-around Nano-Transistors

Study of Silicon Nitride Inner Spacer Formation in Process of Gate-all-around Nano-Transistors

Stacked SiGe/Si structures are widely used as the units for gate-all-around nanowire transistors (GAA NWTs) which are a promising candidate beyond fin field effective transistors (FinFETs) technologies in near future. These structures deal with a several challenges brought by the shrinking of device...

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Bibliographic Details
Main Authors:	Junjie Li, Yongliang Li, Na Zhou, Wenjuan Xiong, Guilei Wang, Qingzhu Zhang, Anyan Du, Jianfeng Gao, Zhenzhen Kong, Hongxiao Lin, Jinjuan Xiang, Chen Li, Xiaogen Yin, Xiaolei Wang, Hong Yang, Xueli Ma, Jianghao Han, Jing Zhang, Tairan Hu, Zhe Cao, Tao Yang, Junfeng Li, Huaxiang Yin, Huilong Zhu, Jun Luo, Wenwu Wang, Henry H. Radamson
Format:	Article
Language:	English
Published:	MDPI AG 2020-04-01
Series:	Nanomaterials
Subjects:	inner spacer gate-all-around (GAA) nanowire nanosheet field effect transistor nanostructure manufacture
Online Access:	https://www.mdpi.com/2079-4991/10/4/793

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