Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors

Fabrication Technology and Characteristics Research of a Monolithically-Integrated 2D Magnetic Field Sensor Based on Silicon Magnetic Sensitive Transistors

A monolithically-integrated two-dimensional (2D) magnetic field sensor consisting of two difference structures (DSІ and DSII) is proposed in this paper. The DSІ and DSII are composed of four silicon magnetic sensitive transistors (SMST1, SMST2, SMST3 and SMST4) and four collector load resistors (RL1...

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Bibliographic Details
Main Authors: Xiaofeng Zhao, Chenchen Jin, Qi Deng, Meiwei Lv, Dianzhong Wen
Format: Article
Language:English
Published: MDPI AG 2018-08-01
Series:Sensors
Subjects:
two-dimensional magnetic field sensor
silicon magnetic sensitive transistor
monolithic integration
difference structure
MEMS technology
Online Access:http://www.mdpi.com/1424-8220/18/8/2551

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