The atomic force microscope as a mechano–electrochemical pen

We demonstrate a method that allows the controlled writing of metallic patterns on the nanometer scale using the tip of an atomic force microscope (AFM) as a “mechano–electrochemical pen”. In contrast to previous experiments, no voltage is applied between the AFM tip and the sample surface. Instead,...

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Main Authors: Christian Obermair, Andreas Wagner, Thomas Schimmel
Format: Article
Language:English
Published: Beilstein-Institut 2011-10-01
Series:Beilstein Journal of Nanotechnology
Subjects:
Online Access:https://doi.org/10.3762/bjnano.2.70
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author Christian Obermair
Andreas Wagner
Thomas Schimmel
author_facet Christian Obermair
Andreas Wagner
Thomas Schimmel
author_sort Christian Obermair
collection DOAJ
description We demonstrate a method that allows the controlled writing of metallic patterns on the nanometer scale using the tip of an atomic force microscope (AFM) as a “mechano–electrochemical pen”. In contrast to previous experiments, no voltage is applied between the AFM tip and the sample surface. Instead, a passivated sample surface is activated locally due to lateral forces between the AFM tip and the sample surface. In this way, the area of tip–sample interaction is narrowly limited by the mechanical contact between tip and sample, and well-defined metallic patterns can be written reproducibly. Nanoscale structures and lines of copper were deposited, and the line widths ranged between 5 nm and 80 nm, depending on the deposition parameters. A procedure for the sequential writing of metallic nanostructures is introduced, based on the understanding of the passivation process. The mechanism of this mechano–electrochemical writing technique is investigated, and the processes of site-selective surface depassivation, deposition, dissolution and repassivation of electrochemically deposited nanoscale metallic islands are studied in detail.
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spelling doaj.art-5a6179f00b754407beb04e346ba281fc2022-12-22T00:58:35ZengBeilstein-InstitutBeilstein Journal of Nanotechnology2190-42862011-10-012165966410.3762/bjnano.2.702190-4286-2-70The atomic force microscope as a mechano–electrochemical penChristian Obermair0Andreas Wagner1Thomas Schimmel2Institute of Applied Physics and Center for Functional Nanostructures (CFN), South Campus, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, GermanyInstitute of Applied Physics and Center for Functional Nanostructures (CFN), South Campus, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, GermanyInstitute of Applied Physics and Center for Functional Nanostructures (CFN), South Campus, Karlsruhe Institute of Technology (KIT), 76128 Karlsruhe, GermanyWe demonstrate a method that allows the controlled writing of metallic patterns on the nanometer scale using the tip of an atomic force microscope (AFM) as a “mechano–electrochemical pen”. In contrast to previous experiments, no voltage is applied between the AFM tip and the sample surface. Instead, a passivated sample surface is activated locally due to lateral forces between the AFM tip and the sample surface. In this way, the area of tip–sample interaction is narrowly limited by the mechanical contact between tip and sample, and well-defined metallic patterns can be written reproducibly. Nanoscale structures and lines of copper were deposited, and the line widths ranged between 5 nm and 80 nm, depending on the deposition parameters. A procedure for the sequential writing of metallic nanostructures is introduced, based on the understanding of the passivation process. The mechanism of this mechano–electrochemical writing technique is investigated, and the processes of site-selective surface depassivation, deposition, dissolution and repassivation of electrochemically deposited nanoscale metallic islands are studied in detail.https://doi.org/10.3762/bjnano.2.70atomic force microscopydepositionelectrochemistrynanoelectronicsnanofabricationnanolithographynanotechnologyNEMS and MEMSscanning probe lithography
spellingShingle Christian Obermair
Andreas Wagner
Thomas Schimmel
The atomic force microscope as a mechano–electrochemical pen
Beilstein Journal of Nanotechnology
atomic force microscopy
deposition
electrochemistry
nanoelectronics
nanofabrication
nanolithography
nanotechnology
NEMS and MEMS
scanning probe lithography
title The atomic force microscope as a mechano–electrochemical pen
title_full The atomic force microscope as a mechano–electrochemical pen
title_fullStr The atomic force microscope as a mechano–electrochemical pen
title_full_unstemmed The atomic force microscope as a mechano–electrochemical pen
title_short The atomic force microscope as a mechano–electrochemical pen
title_sort atomic force microscope as a mechano electrochemical pen
topic atomic force microscopy
deposition
electrochemistry
nanoelectronics
nanofabrication
nanolithography
nanotechnology
NEMS and MEMS
scanning probe lithography
url https://doi.org/10.3762/bjnano.2.70
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