Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing.
We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This tech...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
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Public Library of Science (PLoS)
2013-01-01
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| Series: | PLoS ONE |
| Online Access: | http://europepmc.org/articles/PMC3743781?pdf=render |
| _version_ | 1818583810482110464 |
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| author | Zhen Zheng Long Chang Ivan Nekrashevich Paul Ruchhoeft Sakhrat Khizroev Dmitri Litvinov |
| author_facet | Zhen Zheng Long Chang Ivan Nekrashevich Paul Ruchhoeft Sakhrat Khizroev Dmitri Litvinov |
| author_sort | Zhen Zheng |
| collection | DOAJ |
| description | We describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where close packed square magnetic bits may improve its recording performance. The process and results of generating close packed square patterns by self-limiting low-energy glow-discharge are investigated. Dense magnetic arrays formed by electrochemical deposition of nickel over self-limiting formed molds are demonstrated. |
| first_indexed | 2024-12-16T08:11:12Z |
| format | Article |
| id | doaj.art-5b1c1792ba4e40a1b168e9670fdc25ad |
| institution | Directory Open Access Journal |
| issn | 1932-6203 |
| language | English |
| last_indexed | 2024-12-16T08:11:12Z |
| publishDate | 2013-01-01 |
| publisher | Public Library of Science (PLoS) |
| record_format | Article |
| series | PLoS ONE |
| spelling | doaj.art-5b1c1792ba4e40a1b168e9670fdc25ad2022-12-21T22:38:21ZengPublic Library of Science (PLoS)PLoS ONE1932-62032013-01-0188e7308310.1371/journal.pone.0073083Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing.Zhen ZhengLong ChangIvan NekrashevichPaul RuchhoeftSakhrat KhizroevDmitri LitvinovWe describe a low-energy glow-discharge process using reactive ion etching system that enables non-circular device patterns, such as squares or hexagons, to be formed from a precursor array of uniform circular openings in polymethyl methacrylate, PMMA, defined by electron beam lithography. This technique is of a particular interest for bit-patterned magnetic recording medium fabrication, where close packed square magnetic bits may improve its recording performance. The process and results of generating close packed square patterns by self-limiting low-energy glow-discharge are investigated. Dense magnetic arrays formed by electrochemical deposition of nickel over self-limiting formed molds are demonstrated.http://europepmc.org/articles/PMC3743781?pdf=render |
| spellingShingle | Zhen Zheng Long Chang Ivan Nekrashevich Paul Ruchhoeft Sakhrat Khizroev Dmitri Litvinov Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. PLoS ONE |
| title | Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. |
| title_full | Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. |
| title_fullStr | Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. |
| title_full_unstemmed | Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. |
| title_short | Fabrication of dense non-circular nanomagnetic device arrays using self-limiting low-energy glow-discharge processing. |
| title_sort | fabrication of dense non circular nanomagnetic device arrays using self limiting low energy glow discharge processing |
| url | http://europepmc.org/articles/PMC3743781?pdf=render |
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