Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers
A comparative study of Mo/B _4 C and Mo _x C _1-x /B _4 C multilayers deposited by DC magnetron sputtering technology was presented in this paper. Using a homemade real-time stress measure instrument, the stress of two kinds of multilayers was investigated. Characterizations of the multilayers befor...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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IOP Publishing
2020-01-01
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| Series: | Materials Research Express |
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| Online Access: | https://doi.org/10.1088/2053-1591/ab7c87 |
| _version_ | 1797746469550161920 |
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| author | Jingtao Zhu Bin Ji Jie Zhu Hui Jiang Shengming Zhu Miao Li Jiayi Zhang |
| author_facet | Jingtao Zhu Bin Ji Jie Zhu Hui Jiang Shengming Zhu Miao Li Jiayi Zhang |
| author_sort | Jingtao Zhu |
| collection | DOAJ |
| description | A comparative study of Mo/B _4 C and Mo _x C _1-x /B _4 C multilayers deposited by DC magnetron sputtering technology was presented in this paper. Using a homemade real-time stress measure instrument, the stress of two kinds of multilayers was investigated. Characterizations of the multilayers before and after annealing were performed by grazing incident and at-wavelength near-normal incident x-ray reflectivity. Experimental results show that after replacing Mo by Mo _x C _1-x , Mo _x C _1-x /B _4 C multilayers obtain relatively smaller compressive stress compared with Mo/B _4 C multilayers. The corresponding stress value changes from −0.99 GPa to −0.36 Gpa. Mo _x C _1-x /B _4 C multilayers have also proven to have better thermal stability up to 600 °C. After repeatedly annealing from 100 °C to 600 °C, Mo/B _4 C multilayers had a ∼2% decrease in near-normal incident reflectivity, while Mo _x C _1-x /B _4 C multilayers had a smaller 1.4% loss of reflectivity and a higher stability temperature. |
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| id | doaj.art-5b3e6acaa540458094c2b0accc4958b5 |
| institution | Directory Open Access Journal |
| issn | 2053-1591 |
| language | English |
| last_indexed | 2024-03-12T15:37:16Z |
| publishDate | 2020-01-01 |
| publisher | IOP Publishing |
| record_format | Article |
| series | Materials Research Express |
| spelling | doaj.art-5b3e6acaa540458094c2b0accc4958b52023-08-09T16:08:57ZengIOP PublishingMaterials Research Express2053-15912020-01-017303640310.1088/2053-1591/ab7c87Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayersJingtao Zhu0https://orcid.org/0000-0001-6666-7949Bin Ji1https://orcid.org/0000-0003-3267-1776Jie Zhu2Hui Jiang3https://orcid.org/0000-0002-0228-7266Shengming Zhu4Miao Li5Jiayi Zhang6MOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaMOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaMOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaShanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, Zhangheng Road 239, Pudong District, Shanghai 201204, People’s Republic of ChinaMOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaMOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaMOE Key Laboratory of Advanced Micro-structured Materials, School of Physics Science and Engineering, Tongji University , Shanghai 200092, People’s Republic of ChinaA comparative study of Mo/B _4 C and Mo _x C _1-x /B _4 C multilayers deposited by DC magnetron sputtering technology was presented in this paper. Using a homemade real-time stress measure instrument, the stress of two kinds of multilayers was investigated. Characterizations of the multilayers before and after annealing were performed by grazing incident and at-wavelength near-normal incident x-ray reflectivity. Experimental results show that after replacing Mo by Mo _x C _1-x , Mo _x C _1-x /B _4 C multilayers obtain relatively smaller compressive stress compared with Mo/B _4 C multilayers. The corresponding stress value changes from −0.99 GPa to −0.36 Gpa. Mo _x C _1-x /B _4 C multilayers have also proven to have better thermal stability up to 600 °C. After repeatedly annealing from 100 °C to 600 °C, Mo/B _4 C multilayers had a ∼2% decrease in near-normal incident reflectivity, while Mo _x C _1-x /B _4 C multilayers had a smaller 1.4% loss of reflectivity and a higher stability temperature.https://doi.org/10.1088/2053-1591/ab7c87multilayersreal-time stress measurementannealingco-supttering |
| spellingShingle | Jingtao Zhu Bin Ji Jie Zhu Hui Jiang Shengming Zhu Miao Li Jiayi Zhang Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers Materials Research Express multilayers real-time stress measurement annealing co-supttering |
| title | Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers |
| title_full | Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers |
| title_fullStr | Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers |
| title_full_unstemmed | Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers |
| title_short | Studies on the stress and thermal properties of Mo/B4C and MoxC1-x/B4C multilayers |
| title_sort | studies on the stress and thermal properties of mo b4c and moxc1 x b4c multilayers |
| topic | multilayers real-time stress measurement annealing co-supttering |
| url | https://doi.org/10.1088/2053-1591/ab7c87 |
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