A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field
In this paper, a novel method, named PM-E, to focus the sheet electron beam (SEB) is proposed. This new method consists of a periodic magnetic field and an electrostatic field, which are used to control the thickness and width of the SEB, respectively. The PM-E system utilizes this electrostatic fie...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-08-01
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| Series: | Electronics |
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| Online Access: | https://www.mdpi.com/2079-9292/10/17/2118 |
| _version_ | 1797521516294832128 |
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| author | Pengcheng Yin Jin Xu Lingna Yue Ruichao Yang Hairong Yin Guoqing Zhao Guo Guo Jianwei Liu Wenxiang Wang Yubin Gong Jinjun Feng Dazhi Li Yanyu Wei |
| author_facet | Pengcheng Yin Jin Xu Lingna Yue Ruichao Yang Hairong Yin Guoqing Zhao Guo Guo Jianwei Liu Wenxiang Wang Yubin Gong Jinjun Feng Dazhi Li Yanyu Wei |
| author_sort | Pengcheng Yin |
| collection | DOAJ |
| description | In this paper, a novel method, named PM-E, to focus the sheet electron beam (SEB) is proposed. This new method consists of a periodic magnetic field and an electrostatic field, which are used to control the thickness and width of the SEB, respectively. The PM-E system utilizes this electrostatic field to replace the unreliable <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msub><mi>B</mi><mrow><mi>y</mi><mo>,</mo><mi>o</mi><mi>f</mi><mi>f</mi></mrow></msub></mrow></semantics></math></inline-formula>, which is a tiny transverse magnetic field in the PCM that confines the SEB’s width. Moreover, the horizontal focusing force of the PM-E system is more uniform than that of the conventional PCM, and the transition distance of the former is shorter than that of the latter. In addition, the simulation results demonstrate the ability of the PM-E system to resist the influence of the assembly error. Furthermore, in the PM-E system, the electric field can be conveniently changed to correct the deflection of the SEB’s trajectory and to improve the quality of the SEB. |
| first_indexed | 2024-03-10T08:13:36Z |
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| id | doaj.art-5b864ce276814ca696b167f455998f1e |
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| issn | 2079-9292 |
| language | English |
| last_indexed | 2024-03-10T08:13:36Z |
| publishDate | 2021-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Electronics |
| spelling | doaj.art-5b864ce276814ca696b167f455998f1e2023-11-22T10:30:11ZengMDPI AGElectronics2079-92922021-08-011017211810.3390/electronics10172118A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic FieldPengcheng Yin0Jin Xu1Lingna Yue2Ruichao Yang3Hairong Yin4Guoqing Zhao5Guo Guo6Jianwei Liu7Wenxiang Wang8Yubin Gong9Jinjun Feng10Dazhi Li11Yanyu Wei12National Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaNational Key Laboratory of Science and Technology on Vacuum Electronics, Beijing Vacuum Electronics Research Institute, Beijing 100015, ChinaNeubrex. Ltd., Kobe 6500023, JapanNational Key Laboratory of Science and Technology on Vacuum Electronics, School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, ChinaIn this paper, a novel method, named PM-E, to focus the sheet electron beam (SEB) is proposed. This new method consists of a periodic magnetic field and an electrostatic field, which are used to control the thickness and width of the SEB, respectively. The PM-E system utilizes this electrostatic field to replace the unreliable <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><msub><mi>B</mi><mrow><mi>y</mi><mo>,</mo><mi>o</mi><mi>f</mi><mi>f</mi></mrow></msub></mrow></semantics></math></inline-formula>, which is a tiny transverse magnetic field in the PCM that confines the SEB’s width. Moreover, the horizontal focusing force of the PM-E system is more uniform than that of the conventional PCM, and the transition distance of the former is shorter than that of the latter. In addition, the simulation results demonstrate the ability of the PM-E system to resist the influence of the assembly error. Furthermore, in the PM-E system, the electric field can be conveniently changed to correct the deflection of the SEB’s trajectory and to improve the quality of the SEB.https://www.mdpi.com/2079-9292/10/17/2118SEBfocusing systemelectron optical system |
| spellingShingle | Pengcheng Yin Jin Xu Lingna Yue Ruichao Yang Hairong Yin Guoqing Zhao Guo Guo Jianwei Liu Wenxiang Wang Yubin Gong Jinjun Feng Dazhi Li Yanyu Wei A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field Electronics SEB focusing system electron optical system |
| title | A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field |
| title_full | A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field |
| title_fullStr | A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field |
| title_full_unstemmed | A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field |
| title_short | A New Method to Focus SEBs Using the Periodic Magnetic Field and the Electrostatic Field |
| title_sort | new method to focus sebs using the periodic magnetic field and the electrostatic field |
| topic | SEB focusing system electron optical system |
| url | https://www.mdpi.com/2079-9292/10/17/2118 |
| work_keys_str_mv | AT pengchengyin anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jinxu anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT lingnayue anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT ruichaoyang anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT hairongyin anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT guoqingzhao anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT guoguo anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jianweiliu anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT wenxiangwang anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT yubingong anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jinjunfeng anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT dazhili anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT yanyuwei anewmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT pengchengyin newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jinxu newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT lingnayue newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT ruichaoyang newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT hairongyin newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT guoqingzhao newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT guoguo newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jianweiliu newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT wenxiangwang newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT yubingong newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT jinjunfeng newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT dazhili newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield AT yanyuwei newmethodtofocussebsusingtheperiodicmagneticfieldandtheelectrostaticfield |