Anti-reflective nano- and micro-structures on 4H-SiC for photodiodes
<p>Abstract</p> <p>In this study, nano-scale honeycomb-shaped structures with anti-reflection properties were successfully formed on SiC. The surface of 4H-SiC wafer after a conventional photolithography process was etched by inductively coupled plasma. We demonstrate that the refl...
Main Authors: | Joo Sung-Jae, Bahng Wook, Kim Nam-Kyun, Kang Min-Seok, Lee Ji-Hoon, Koo Sang-Mo |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2011-01-01
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Series: | Nanoscale Research Letters |
Online Access: | http://www.nanoscalereslett.com/content/6/1/236 |
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