A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders
The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS...
| Main Authors: | , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-05-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/10/3564 |
| _version_ | 1797533343545294848 |
|---|---|
| author | Michał Szermer Piotr Zając Piotr Amrozik Cezary Maj Mariusz Jankowski Grzegorz Jabłoński Rafał Kiełbik Jacek Nazdrowicz Małgorzata Napieralska Bartosz Sakowicz |
| author_facet | Michał Szermer Piotr Zając Piotr Amrozik Cezary Maj Mariusz Jankowski Grzegorz Jabłoński Rafał Kiełbik Jacek Nazdrowicz Małgorzata Napieralska Bartosz Sakowicz |
| author_sort | Michał Szermer |
| collection | DOAJ |
| description | The constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor. |
| first_indexed | 2024-03-10T11:13:12Z |
| format | Article |
| id | doaj.art-5bb3c5719ea4443ebe60c16918c75603 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-03-10T11:13:12Z |
| publishDate | 2021-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-5bb3c5719ea4443ebe60c16918c756032023-11-21T20:36:48ZengMDPI AGSensors1424-82202021-05-012110356410.3390/s21103564A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance DisordersMichał Szermer0Piotr Zając1Piotr Amrozik2Cezary Maj3Mariusz Jankowski4Grzegorz Jabłoński5Rafał Kiełbik6Jacek Nazdrowicz7Małgorzata Napieralska8Bartosz Sakowicz9Department of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandDepartment of Microelectronics and Computer Science, Lodz University of Technology, 93-005 Lodz, PolandThe constant development and miniaturization of MEMS sensors invariably provides new possibilities for their use in health-related and medical applications. The application of MEMS devices in posturographic systems allows faster diagnosis and significantly facilitates the work of medical staff. MEMS accelerometers constitute a vital part of such systems, particularly those intended for monitoring patients with imbalance disorders. The correct design of such sensors is crucial for gathering data about patient movement and ensuring the good overall performance of the entire system. This paper presents the design and measurements of a three-axis accelerometer dedicated for use in a device which tracks patient movement. Its main focus is the characterization of the sensor, comparing different designs and evaluating the impact of the packaging and readout circuit integration on sensor operation. Extensive testing and measurements confirm that the designed accelerometer works correctly and allows identifying the best design in terms of sensitivity/stability. Moreover, the response of the proposed sensor as a function of the applied acceleration demonstrates very good linearity only if the readout circuit is integrated in the same package as the MEMS sensor.https://www.mdpi.com/1424-8220/21/10/3564MEMS accelerometerASIC readout circuitportable systemimbalance disorders |
| spellingShingle | Michał Szermer Piotr Zając Piotr Amrozik Cezary Maj Mariusz Jankowski Grzegorz Jabłoński Rafał Kiełbik Jacek Nazdrowicz Małgorzata Napieralska Bartosz Sakowicz A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders Sensors MEMS accelerometer ASIC readout circuit portable system imbalance disorders |
| title | A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders |
| title_full | A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders |
| title_fullStr | A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders |
| title_full_unstemmed | A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders |
| title_short | A Capacitive 3-Axis MEMS Accelerometer for Medipost: A Portable System Dedicated to Monitoring Imbalance Disorders |
| title_sort | capacitive 3 axis mems accelerometer for medipost a portable system dedicated to monitoring imbalance disorders |
| topic | MEMS accelerometer ASIC readout circuit portable system imbalance disorders |
| url | https://www.mdpi.com/1424-8220/21/10/3564 |
| work_keys_str_mv | AT michałszermer acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT piotrzajac acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT piotramrozik acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT cezarymaj acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT mariuszjankowski acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT grzegorzjabłonski acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT rafałkiełbik acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT jaceknazdrowicz acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT małgorzatanapieralska acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT bartoszsakowicz acapacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT michałszermer capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT piotrzajac capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT piotramrozik capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT cezarymaj capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT mariuszjankowski capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT grzegorzjabłonski capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT rafałkiełbik capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT jaceknazdrowicz capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT małgorzatanapieralska capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders AT bartoszsakowicz capacitive3axismemsaccelerometerformedipostaportablesystemdedicatedtomonitoringimbalancedisorders |