不同气氛热冲击下Al:WS<sub>2</sub>薄膜摩擦学性能的响应机理

不同气氛热冲击下Al:WS<sub>2</sub>薄膜摩擦学性能的响应机理

采用磁控溅射技术制备了Al:WS<sub>2</sub>薄膜。为考查不同气氛热冲击下Al:WS<sub>2</sub>薄膜摩擦学性能的响应机理，采用自行研制的温度交变真空摩擦试验机开展了真空、氮气及氧气气氛的–100～+250℃的热冲击试验，并对热冲击后Al:WS<sub>2</sub>薄膜结构、成分以及摩擦学性能进行了研究。研究发现，热冲击后，Al:WS<sub>2</sub>薄膜柱状晶长大，S含量减少，部分WS<sub>2</sub>被氧化为WO<sub>3&...

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Bibliographic Details
Main Authors:	刘建, 剡珍, 郝俊英, 刘维民
Format:	Article
Language:	English
Published:	Science Press 2023-11-01
Series:	Kongjian kexue xuebao
Subjects:	Al:WS<sub>2</sub>薄膜热冲击气氛摩擦
Online Access:	https://www.sciengine.com/doi/10.11728/cjss2023.05.2022-0037

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