Measurement accuracy analysis for microgeometry nanostandards with microinterferometer and stylus profilometer
The goal of the work, described in this paper, was to examine and analyse measurement capabilities of GUM Length and Angle Department in measurements of step height/depth standards with the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements were performed with m...
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| Format: | Article |
| Language: | English |
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Military University of Technology, Warsaw
2018-12-01
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| Series: | Biuletyn Wojskowej Akademii Technicznej |
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| Online Access: | http://biuletynwat.pl/gicid/01.3001.0012.8503 |