Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps

Comparison of UV-curable materials for high-resolution polymer nanoimprint stamps

We present a systematic comparison of four resins for nanoimprint intermediate polymer stamps, the standard IPS material, OrmoStamp and two new polymers GMN-PS90 (foil) and GMN-PS40 (liquid). The new polymers are based on acrylated silane and offer sufficiently high Young's modulus and low shri...

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Bibliographic Details
Main Authors:	Muhammad H. Asif, Mariusz Graczyk, Babak Heidari, Ivan Maximov
Format:	Article
Language:	English
Published:	Elsevier 2022-04-01
Series:	Micro and Nano Engineering
Subjects:	Nanoimprint stamps UV-curable polymers Nanoimprint lithography High-resolution patterning
Online Access:	http://www.sciencedirect.com/science/article/pii/S2590007222000156

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