| Summary: | The purpose of this paper was to investigate the influence of fabrication process uncertainty on terahertz metasurface quality. The focus was on the effect of metasurface fabrication inaccuracy on resonances. To the best of our knowledge, this is the first paper to study the effect of the metasurface fabrication process on its resonant frequency. The terahertz split ring resonator-based metasurface is under consideration. Using a numerical model, the influence of the uncertainty of various geometrical parameters obtained during the fabrication process (mainly layer deposition, photolithography, and etching processes) is analyzed according to the resonance of the designed metasurface. The influence of the following parameters causes a shift of resonant frequencies of the considered metasurface: etching deviation <i>e</i>, metallization thickness <i>t</i><sub>Al</sub> and SiO<sub>2</sub> layer thickness <i>t</i><sub>SiO2</sub>. The quality of the metasurface affected by the variations of obtained geometrical parameters was determined by the deviation of resonant frequency Δ<i>f</i><sub>r</sub>. The developed numerical model was verified by THz-TDS (terahertz time-domain spectroscopy) measurements of the fabricated structure.
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