Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality
The purpose of this paper was to investigate the influence of fabrication process uncertainty on terahertz metasurface quality. The focus was on the effect of metasurface fabrication inaccuracy on resonances. To the best of our knowledge, this is the first paper to study the effect of the metasurfac...
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MDPI AG
2023-05-01
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| Series: | Electronics |
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| Online Access: | https://www.mdpi.com/2079-9292/12/10/2198 |
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| author | Przemyslaw Lopato Michal Herbko Paulina Gora Ulrich Mescheder Andras Kovacs Alexander Filbert |
| author_facet | Przemyslaw Lopato Michal Herbko Paulina Gora Ulrich Mescheder Andras Kovacs Alexander Filbert |
| author_sort | Przemyslaw Lopato |
| collection | DOAJ |
| description | The purpose of this paper was to investigate the influence of fabrication process uncertainty on terahertz metasurface quality. The focus was on the effect of metasurface fabrication inaccuracy on resonances. To the best of our knowledge, this is the first paper to study the effect of the metasurface fabrication process on its resonant frequency. The terahertz split ring resonator-based metasurface is under consideration. Using a numerical model, the influence of the uncertainty of various geometrical parameters obtained during the fabrication process (mainly layer deposition, photolithography, and etching processes) is analyzed according to the resonance of the designed metasurface. The influence of the following parameters causes a shift of resonant frequencies of the considered metasurface: etching deviation <i>e</i>, metallization thickness <i>t</i><sub>Al</sub> and SiO<sub>2</sub> layer thickness <i>t</i><sub>SiO2</sub>. The quality of the metasurface affected by the variations of obtained geometrical parameters was determined by the deviation of resonant frequency Δ<i>f</i><sub>r</sub>. The developed numerical model was verified by THz-TDS (terahertz time-domain spectroscopy) measurements of the fabricated structure. |
| first_indexed | 2024-03-11T03:47:39Z |
| format | Article |
| id | doaj.art-5cf564b6c4d64da48d5936c6d7d1d2c8 |
| institution | Directory Open Access Journal |
| issn | 2079-9292 |
| language | English |
| last_indexed | 2024-03-11T03:47:39Z |
| publishDate | 2023-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Electronics |
| spelling | doaj.art-5cf564b6c4d64da48d5936c6d7d1d2c82023-11-18T01:09:06ZengMDPI AGElectronics2079-92922023-05-011210219810.3390/electronics12102198Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface QualityPrzemyslaw Lopato0Michal Herbko1Paulina Gora2Ulrich Mescheder3Andras Kovacs4Alexander Filbert5Center for Electromagnetic Fields Engineering and High-Frequency Techniques, Faculty of Electrical Engineering, West Pomeranian University of Technology in Szczecin, ul. Sikorskiego 37, 70-313 Szczecin, PolandCenter for Electromagnetic Fields Engineering and High-Frequency Techniques, Faculty of Electrical Engineering, West Pomeranian University of Technology in Szczecin, ul. Sikorskiego 37, 70-313 Szczecin, PolandCenter for Electromagnetic Fields Engineering and High-Frequency Techniques, Faculty of Electrical Engineering, West Pomeranian University of Technology in Szczecin, ul. Sikorskiego 37, 70-313 Szczecin, PolandInstitute for Microsystems Technology (iMST), Faculty of Mechanical & Medical Engineering, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, GermanyInstitute for Microsystems Technology (iMST), Faculty of Mechanical & Medical Engineering, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, GermanyInstitute for Microsystems Technology (iMST), Faculty of Mechanical & Medical Engineering, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, GermanyThe purpose of this paper was to investigate the influence of fabrication process uncertainty on terahertz metasurface quality. The focus was on the effect of metasurface fabrication inaccuracy on resonances. To the best of our knowledge, this is the first paper to study the effect of the metasurface fabrication process on its resonant frequency. The terahertz split ring resonator-based metasurface is under consideration. Using a numerical model, the influence of the uncertainty of various geometrical parameters obtained during the fabrication process (mainly layer deposition, photolithography, and etching processes) is analyzed according to the resonance of the designed metasurface. The influence of the following parameters causes a shift of resonant frequencies of the considered metasurface: etching deviation <i>e</i>, metallization thickness <i>t</i><sub>Al</sub> and SiO<sub>2</sub> layer thickness <i>t</i><sub>SiO2</sub>. The quality of the metasurface affected by the variations of obtained geometrical parameters was determined by the deviation of resonant frequency Δ<i>f</i><sub>r</sub>. The developed numerical model was verified by THz-TDS (terahertz time-domain spectroscopy) measurements of the fabricated structure.https://www.mdpi.com/2079-9292/12/10/2198metasurfacesterahertz deviceselectromagnetic wavesfinite element model |
| spellingShingle | Przemyslaw Lopato Michal Herbko Paulina Gora Ulrich Mescheder Andras Kovacs Alexander Filbert Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality Electronics metasurfaces terahertz devices electromagnetic waves finite element model |
| title | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality |
| title_full | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality |
| title_fullStr | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality |
| title_full_unstemmed | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality |
| title_short | Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality |
| title_sort | numerical analysis of the influence of fabrication process uncertainty on terahertz metasurface quality |
| topic | metasurfaces terahertz devices electromagnetic waves finite element model |
| url | https://www.mdpi.com/2079-9292/12/10/2198 |
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