H-Shaped Multiple Linear Motor Drive Platform Control System Design Based on an Inverse System Method
Due to its simple mechanical structure and high motion stability, the H-shaped platform has been increasingly widely used in precision measuring, numerical control machining and semiconductor packaging equipment, etc. The H-shaped platform is normally driven by multiple (three) permanent magnet sync...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-12-01
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| Series: | Energies |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1073/10/12/1990 |