Improved Electrical and Optical Properties of IGZO Transparent Conductive Oxide Due to Microwave Treatment: Application to Silicon Solar Cells
The electrical and optical properties of IGZO-based transparent conductive oxide (TCO), fabricated by reactive-sputtering, are optimized using post microwave treatment (MWT), not rapid temperature annealing (RTA), for silicon solar cell. Compared to the sheet resistance and transmittance of IGZO-bas...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2022-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/9868021/ |