Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields
We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained usin...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-02-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/2/257 |
| _version_ | 1797297470701568000 |
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| author | Stella Lulinsky Ben Torteman Bojan R. Ilic Slava Krylov |
| author_facet | Stella Lulinsky Ben Torteman Bojan R. Ilic Slava Krylov |
| author_sort | Stella Lulinsky |
| collection | DOAJ |
| description | We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results show that omnidirectional acoustic pressure used as a noncontact source for linear harmonic driving is a convenient and versatile tool for the mechanical dynamic characterization of unpackaged, nonintegrated microstructures. The fringing field’s electrostatic actuation allows for efficient parametric amplification of an acoustic signal. The suggested amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and microphone arrays, and hearing aids. It can be used also for upward frequency tuning. |
| first_indexed | 2024-03-07T22:20:49Z |
| format | Article |
| id | doaj.art-5de85cd0c36b4893bef7cf49fa3508d5 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-07T22:20:49Z |
| publishDate | 2024-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-5de85cd0c36b4893bef7cf49fa3508d52024-02-23T15:27:48ZengMDPI AGMicromachines2072-666X2024-02-0115225710.3390/mi15020257Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic FieldsStella Lulinsky0Ben Torteman1Bojan R. Ilic2Slava Krylov3School of Mechanical Engineering, Faculty of Engineereing, Tel Aviv University, Ramat Aviv, Tel Aviv 69978, IsraelSchool of Mechanical Engineering, Faculty of Engineereing, Tel Aviv University, Ramat Aviv, Tel Aviv 69978, IsraelCenter of Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899, USASchool of Mechanical Engineering, Faculty of Engineereing, Tel Aviv University, Ramat Aviv, Tel Aviv 69978, IsraelWe report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained using the Galerkin order reduction technique. Our experimental results show that omnidirectional acoustic pressure used as a noncontact source for linear harmonic driving is a convenient and versatile tool for the mechanical dynamic characterization of unpackaged, nonintegrated microstructures. The fringing field’s electrostatic actuation allows for efficient parametric amplification of an acoustic signal. The suggested amplification approach may have applications in a wide variety of micromechanical devices, including resonant sensors, microphones and microphone arrays, and hearing aids. It can be used also for upward frequency tuning.https://www.mdpi.com/2072-666X/15/2/257parametric amplificationMEMSelectrostatic actuationacoustic sensorcantilever |
| spellingShingle | Stella Lulinsky Ben Torteman Bojan R. Ilic Slava Krylov Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields Micromachines parametric amplification MEMS electrostatic actuation acoustic sensor cantilever |
| title | Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields |
| title_full | Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields |
| title_fullStr | Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields |
| title_full_unstemmed | Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields |
| title_short | Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields |
| title_sort | parametric amplification of acoustically actuated micro beams using fringing electrostatic fields |
| topic | parametric amplification MEMS electrostatic actuation acoustic sensor cantilever |
| url | https://www.mdpi.com/2072-666X/15/2/257 |
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