Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields
We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained usin...
| Main Authors: | , , , |
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| Formato: | Artigo |
| Idioma: | English |
| Publicado: |
MDPI AG
2024-02-01
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| Series: | Micromachines |
| Subjects: | |
| Acceso en liña: | https://www.mdpi.com/2072-666X/15/2/257 |