Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields

Parametric Amplification of Acoustically Actuated Micro Beams Using Fringing Electrostatic Fields

We report on theoretical and experimental investigation of parametric amplification of acoustically excited vibrations in micromachined single-crystal silicon cantilevers electrostatically actuated by fringing fields. The device dynamics are analyzed using the Mathieu–Duffing equation, obtained usin...

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Bibliographic Details
Main Authors: Stella Lulinsky, Ben Torteman, Bojan R. Ilic, Slava Krylov
Format: Article
Language:English
Published: MDPI AG 2024-02-01
Series:Micromachines
Subjects:
parametric amplification
MEMS
electrostatic actuation
acoustic sensor
cantilever
Online Access:https://www.mdpi.com/2072-666X/15/2/257

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