Measure transparent elements using least squares iterative phase shift method
In order to measure the surface phase of the front and back of the transparent plate more accurately, a phase shift algorithm based on least squares iteration is proposed. After a least squares phase shift algorithm, the corresponding transparent flat surface pattern can be obtained, but the accurac...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
National Computer System Engineering Research Institute of China
2021-01-01
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| Series: | Dianzi Jishu Yingyong |
| Subjects: | |
| Online Access: | http://www.chinaaet.com/article/3000128427 |
| _version_ | 1831682986792189952 |
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| author | Li Jingwei Xin Qing Yu Jie Hou Changlun |
| author_facet | Li Jingwei Xin Qing Yu Jie Hou Changlun |
| author_sort | Li Jingwei |
| collection | DOAJ |
| description | In order to measure the surface phase of the front and back of the transparent plate more accurately, a phase shift algorithm based on least squares iteration is proposed. After a least squares phase shift algorithm, the corresponding transparent flat surface pattern can be obtained, but the accuracy of the obtained surface map is not high because there is an error in the initial phase value. Therefore, it is necessary to derive the accurate phase value from the obtained surface map. The algorithm calculates the more accurate initial phase shift value by the method of least squares and multiple iterations. After the simulation experiment of the method, it is known that the measurement accuracy of this algorithm is high and the anti-noise ability is better. The error of the PV value and RMS value of the surface map is less than 0.006λ. In actual measurement results, the PV error of the measurement result is less than 0.09λ, and the RMS error is less than 0.02λ. The measured shape is close to the true shape of the object, and the measurement accuracy is high. |
| first_indexed | 2024-12-20T06:29:27Z |
| format | Article |
| id | doaj.art-5e13f478164d4317b6ca34b96bc03f4d |
| institution | Directory Open Access Journal |
| issn | 0258-7998 |
| language | zho |
| last_indexed | 2024-12-20T06:29:27Z |
| publishDate | 2021-01-01 |
| publisher | National Computer System Engineering Research Institute of China |
| record_format | Article |
| series | Dianzi Jishu Yingyong |
| spelling | doaj.art-5e13f478164d4317b6ca34b96bc03f4d2022-12-21T19:50:12ZzhoNational Computer System Engineering Research Institute of ChinaDianzi Jishu Yingyong0258-79982021-01-0147110010710.16157/j.issn.0258-7998.2007533000128427Measure transparent elements using least squares iterative phase shift methodLi Jingwei0Xin Qing1Yu Jie2Hou Changlun3College of Electronic Information，Hangzhou Dianzi University，Hangzhou 310000，ChinaCollege of Electronic Information，Hangzhou Dianzi University，Hangzhou 310000，ChinaCollege of Electronic Information，Hangzhou Dianzi University，Hangzhou 310000，ChinaCollege of Electronic Information，Hangzhou Dianzi University，Hangzhou 310000，ChinaIn order to measure the surface phase of the front and back of the transparent plate more accurately, a phase shift algorithm based on least squares iteration is proposed. After a least squares phase shift algorithm, the corresponding transparent flat surface pattern can be obtained, but the accuracy of the obtained surface map is not high because there is an error in the initial phase value. Therefore, it is necessary to derive the accurate phase value from the obtained surface map. The algorithm calculates the more accurate initial phase shift value by the method of least squares and multiple iterations. After the simulation experiment of the method, it is known that the measurement accuracy of this algorithm is high and the anti-noise ability is better. The error of the PV value and RMS value of the surface map is less than 0.006λ. In actual measurement results, the PV error of the measurement result is less than 0.09λ, and the RMS error is less than 0.02λ. The measured shape is close to the true shape of the object, and the measurement accuracy is high.http://www.chinaaet.com/article/3000128427interferenceleast squares iterative algorithmphase shift algorithmshape detectionmulti-surface interference |
| spellingShingle | Li Jingwei Xin Qing Yu Jie Hou Changlun Measure transparent elements using least squares iterative phase shift method Dianzi Jishu Yingyong interference least squares iterative algorithm phase shift algorithm shape detection multi-surface interference |
| title | Measure transparent elements using least squares iterative phase shift method |
| title_full | Measure transparent elements using least squares iterative phase shift method |
| title_fullStr | Measure transparent elements using least squares iterative phase shift method |
| title_full_unstemmed | Measure transparent elements using least squares iterative phase shift method |
| title_short | Measure transparent elements using least squares iterative phase shift method |
| title_sort | measure transparent elements using least squares iterative phase shift method |
| topic | interference least squares iterative algorithm phase shift algorithm shape detection multi-surface interference |
| url | http://www.chinaaet.com/article/3000128427 |
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