High-Speed Focus Inspection System Using a Position-Sensitive Detector
Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-12-01
|
| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/17/12/2842 |
| _version_ | 1818034727253180416 |
|---|---|
| author | Binh Xuan Cao Phuong Le Hoang Sanghoon Ahn Heeshin Kang Jengo Kim Jiwhan Noh |
| author_facet | Binh Xuan Cao Phuong Le Hoang Sanghoon Ahn Heeshin Kang Jengo Kim Jiwhan Noh |
| author_sort | Binh Xuan Cao |
| collection | DOAJ |
| description | Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips. |
| first_indexed | 2024-12-10T06:43:45Z |
| format | Article |
| id | doaj.art-5e1b2c4196ba46429a0667ccf9d3efc4 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-12-10T06:43:45Z |
| publishDate | 2017-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-5e1b2c4196ba46429a0667ccf9d3efc42022-12-22T01:58:43ZengMDPI AGSensors1424-82202017-12-011712284210.3390/s17122842s17122842High-Speed Focus Inspection System Using a Position-Sensitive DetectorBinh Xuan Cao0Phuong Le Hoang1Sanghoon Ahn2Heeshin Kang3Jengo Kim4Jiwhan Noh5Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, KoreaDepartment of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, KoreaDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, KoreaDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, KoreaDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, KoreaDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, KoreaPrecise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.https://www.mdpi.com/1424-8220/17/12/2842focal position detectionlaser micromachiningCCD camerasingle-slit masksposition-sensitive detector |
| spellingShingle | Binh Xuan Cao Phuong Le Hoang Sanghoon Ahn Heeshin Kang Jengo Kim Jiwhan Noh High-Speed Focus Inspection System Using a Position-Sensitive Detector Sensors focal position detection laser micromachining CCD camera single-slit masks position-sensitive detector |
| title | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
| title_full | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
| title_fullStr | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
| title_full_unstemmed | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
| title_short | High-Speed Focus Inspection System Using a Position-Sensitive Detector |
| title_sort | high speed focus inspection system using a position sensitive detector |
| topic | focal position detection laser micromachining CCD camera single-slit masks position-sensitive detector |
| url | https://www.mdpi.com/1424-8220/17/12/2842 |
| work_keys_str_mv | AT binhxuancao highspeedfocusinspectionsystemusingapositionsensitivedetector AT phuonglehoang highspeedfocusinspectionsystemusingapositionsensitivedetector AT sanghoonahn highspeedfocusinspectionsystemusingapositionsensitivedetector AT heeshinkang highspeedfocusinspectionsystemusingapositionsensitivedetector AT jengokim highspeedfocusinspectionsystemusingapositionsensitivedetector AT jiwhannoh highspeedfocusinspectionsystemusingapositionsensitivedetector |