High-Speed Focus Inspection System Using a Position-Sensitive Detector

High-Speed Focus Inspection System Using a Position-Sensitive Detector

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution fo...

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Bibliographic Details
Main Authors: Binh Xuan Cao, Phuong Le Hoang, Sanghoon Ahn, Heeshin Kang, Jengo Kim, Jiwhan Noh
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Sensors
Subjects:
focal position detection
laser micromachining
CCD camera
single-slit masks
position-sensitive detector
Online Access:https://www.mdpi.com/1424-8220/17/12/2842

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