Record Citations :: UTM Library Massive Scholar Tracking

APA (7th ed.) Citation

Atosuo, E., Heikkilä, M. J., Majlund, J., Pesonen, L., Mäntymäki, M., Mizohata, K., . . . Ritala, M. (2024). Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films. American Chemical Society.

Chicago Style (17th ed.) Citation

Atosuo, Elisa, Mikko J. Heikkilä, Johanna Majlund, Leevi Pesonen, Miia Mäntymäki, Kenichiro Mizohata, Markku Leskelä, and Mikko Ritala. Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films. American Chemical Society, 2024.

MLA (9th ed.) Citation

Atosuo, Elisa, et al. Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films. American Chemical Society, 2024.

Warning: These citations may not always be 100% accurate.