Atomic Layer Deposition of ScF3 and ScxAlyFz Thin Films

Bibliographic Details
Main Authors:	Elisa Atosuo, Mikko J. Heikkilä, Johanna Majlund, Leevi Pesonen, Miia Mäntymäki, Kenichiro Mizohata, Markku Leskelä, Mikko Ritala
Format:	Article
Language:	English
Published:	American Chemical Society 2024-02-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.3c09147

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