Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid
A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different f...
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2019-04-01
|
| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/10/5/283 |
| _version_ | 1819194948085350400 |
|---|---|
| author | Alex Díaz-Molina Víctor Ruiz-Díez Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas |
| author_facet | Alex Díaz-Molina Víctor Ruiz-Díez Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas |
| author_sort | Alex Díaz-Molina |
| collection | DOAJ |
| description | A micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid. |
| first_indexed | 2024-12-23T02:04:58Z |
| format | Article |
| id | doaj.art-5e70a30c74394069a2856a9e37d77184 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-23T02:04:58Z |
| publishDate | 2019-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-5e70a30c74394069a2856a9e37d771842022-12-21T18:03:54ZengMDPI AGMicromachines2072-666X2019-04-0110528310.3390/mi10050283mi10050283Generation of Linear Traveling Waves in Piezoelectric Plates in Air and LiquidAlex Díaz-Molina0Víctor Ruiz-Díez1Jorge Hernando-García2Abdallah Ababneh3Helmut Seidel4José Luis Sánchez-Rojas5Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, SpainMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, SpainMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, SpainElectronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, JordanChair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology, Saarland University, 66123 Saarbrücken, GermanyMicrosystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, E-13071 Ciudad Real, SpainA micro- to milli-sized linear traveling wave (TW) actuator fabricated with microelectromechanical systems (MEMS) technology is demonstrated. The device is a silicon cantilever actuated by piezoelectric aluminum nitride. Specifically designed top electrodes allow the generation of TWs at different frequencies, in air and liquid, by combining two neighboring resonant modes. This approach was supported by analytical calculations, and different TWs were measured on the same plate by laser Doppler vibrometry. Numerical simulations were also carried out and compared with the measurements in air, validating the wave features. A standing wave ratio as low as 1.45 was achieved in air, with a phase velocity of 652 m/s and a peak horizontal velocity on the device surface of 124 μm/s for a driving signal of 1 V at 921.9 kHz. The results show the potential of this kind of actuator for locomotion applications in contact with surfaces or under immersion in liquid.https://www.mdpi.com/2072-666X/10/5/283traveling wavespiezoelectricmicroactuatorMEMS |
| spellingShingle | Alex Díaz-Molina Víctor Ruiz-Díez Jorge Hernando-García Abdallah Ababneh Helmut Seidel José Luis Sánchez-Rojas Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid Micromachines traveling waves piezoelectric microactuator MEMS |
| title | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
| title_full | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
| title_fullStr | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
| title_full_unstemmed | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
| title_short | Generation of Linear Traveling Waves in Piezoelectric Plates in Air and Liquid |
| title_sort | generation of linear traveling waves in piezoelectric plates in air and liquid |
| topic | traveling waves piezoelectric microactuator MEMS |
| url | https://www.mdpi.com/2072-666X/10/5/283 |
| work_keys_str_mv | AT alexdiazmolina generationoflineartravelingwavesinpiezoelectricplatesinairandliquid AT victorruizdiez generationoflineartravelingwavesinpiezoelectricplatesinairandliquid AT jorgehernandogarcia generationoflineartravelingwavesinpiezoelectricplatesinairandliquid AT abdallahababneh generationoflineartravelingwavesinpiezoelectricplatesinairandliquid AT helmutseidel generationoflineartravelingwavesinpiezoelectricplatesinairandliquid AT joseluissanchezrojas generationoflineartravelingwavesinpiezoelectricplatesinairandliquid |