Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect
Tuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its relia...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Elsevier
2020-09-01
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| Series: | Materials & Design |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S0264127520304561 |
| _version_ | 1830358696057634816 |
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| author | Pablo Guzman Toan Dinh Hoang-Phuong Phan Abbin Perunnilathil Joy Afzaal Qamar Behraad Bahreyni Yong Zhu Mina Rais-Zadeh Huaizhong Li Nam-Trung Nguyen Dzung Viet Dao |
| author_facet | Pablo Guzman Toan Dinh Hoang-Phuong Phan Abbin Perunnilathil Joy Afzaal Qamar Behraad Bahreyni Yong Zhu Mina Rais-Zadeh Huaizhong Li Nam-Trung Nguyen Dzung Viet Dao |
| author_sort | Pablo Guzman |
| collection | DOAJ |
| description | Tuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its reliance on metallic heating elements. The use of metallic heaters could limit the tuning capability due to the mismatch in thermal expansion coefficients of materials forming the resonator. To solve this drawback, herein, the design, fabrication, and testing of a highly-doped SiC bridge resonator that excludes the use of metallic material as a heating element has been proposed. Instead, free-standing SiC structure functions as the mechanical resonant component as well as the heating element. Through the use of the Joule heating effect, a frequency tuning capability of almost ∆f/fo ≈ 80% has been demonstrated. The proposed device also exhibited a wide operating frequency range from 72.3 kHz to 14.5 kHz. Our SiC device enables the development of highly sensitive resonant-based sensors, especially in harsh environments. |
| first_indexed | 2024-12-20T02:46:30Z |
| format | Article |
| id | doaj.art-5ee5c29b63e84b5ca2c2876e8ed2946c |
| institution | Directory Open Access Journal |
| issn | 0264-1275 |
| language | English |
| last_indexed | 2024-12-20T02:46:30Z |
| publishDate | 2020-09-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Materials & Design |
| spelling | doaj.art-5ee5c29b63e84b5ca2c2876e8ed2946c2022-12-21T19:56:09ZengElsevierMaterials & Design0264-12752020-09-01194108922Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effectPablo Guzman0Toan Dinh1Hoang-Phuong Phan2Abbin Perunnilathil Joy3Afzaal Qamar4Behraad Bahreyni5Yong Zhu6Mina Rais-Zadeh7Huaizhong Li8Nam-Trung Nguyen9Dzung Viet Dao10Queensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, Australia; Corresponding author.Queensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, Australia; University of Southern Queensland, 37 Sinnathamby Blvd, Springfield, Central QLD 4300, AustraliaQueensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, Australia4D LABS, Simon Fraser University, 8888 University Dr, Burnaby, BC V5A 1S6, CanadaUniversity of Michigan, 500 S State St, Ann Arbor, MI 48109, United States4D LABS, Simon Fraser University, 8888 University Dr, Burnaby, BC V5A 1S6, CanadaQueensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, AustraliaUniversity of Michigan, 500 S State St, Ann Arbor, MI 48109, United StatesSchool of Engineering and Built Environment, Griffith University, Parklands Drive, Southport, QLD 4222, AustraliaQueensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, AustraliaQueensland Micro and Nanotechnology Centre, Griffith University, West Creek Road, Nathan, QLD 4111, AustraliaTuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its reliance on metallic heating elements. The use of metallic heaters could limit the tuning capability due to the mismatch in thermal expansion coefficients of materials forming the resonator. To solve this drawback, herein, the design, fabrication, and testing of a highly-doped SiC bridge resonator that excludes the use of metallic material as a heating element has been proposed. Instead, free-standing SiC structure functions as the mechanical resonant component as well as the heating element. Through the use of the Joule heating effect, a frequency tuning capability of almost ∆f/fo ≈ 80% has been demonstrated. The proposed device also exhibited a wide operating frequency range from 72.3 kHz to 14.5 kHz. Our SiC device enables the development of highly sensitive resonant-based sensors, especially in harsh environments.http://www.sciencedirect.com/science/article/pii/S0264127520304561MEMS resonatorElectrothermal tuningJoule heatingSilicon carbide |
| spellingShingle | Pablo Guzman Toan Dinh Hoang-Phuong Phan Abbin Perunnilathil Joy Afzaal Qamar Behraad Bahreyni Yong Zhu Mina Rais-Zadeh Huaizhong Li Nam-Trung Nguyen Dzung Viet Dao Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect Materials & Design MEMS resonator Electrothermal tuning Joule heating Silicon carbide |
| title | Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect |
| title_full | Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect |
| title_fullStr | Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect |
| title_full_unstemmed | Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect |
| title_short | Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect |
| title_sort | highly doped sic resonator with ultra large tuning frequency range by joule heating effect |
| topic | MEMS resonator Electrothermal tuning Joule heating Silicon carbide |
| url | http://www.sciencedirect.com/science/article/pii/S0264127520304561 |
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