Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Highly-doped SiC resonator with ultra-large tuning frequency range by Joule heating effect

Tuning the natural frequency of a resonator is an innovative approach for the implementation of mechanical resonators in a broad range of fields such as timing applications, filters or sensors. The conventional electrothermal technique is not favorable towards large tuning range because of its relia...

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Bibliographic Details
Main Authors: Pablo Guzman, Toan Dinh, Hoang-Phuong Phan, Abbin Perunnilathil Joy, Afzaal Qamar, Behraad Bahreyni, Yong Zhu, Mina Rais-Zadeh, Huaizhong Li, Nam-Trung Nguyen, Dzung Viet Dao
Format: Article
Language:English
Published: Elsevier 2020-09-01
Series:Materials & Design
Subjects:
MEMS resonator
Electrothermal tuning
Joule heating
Silicon carbide
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127520304561

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