Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography

In recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional mic...

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Main Authors: Roman Zvagelsky, Frederik Mayer, Dominik Beutel, Carsten Rockstuhl, Guillaume Gomard, Martin Wegener
Format: Article
Language:English
Published: Light Publishing Group 2022-06-01
Series:Light: Advanced Manufacturing
Subjects:
Online Access:https://www.light-am.com/article/doi/10.37188/lam.2022.039
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author Roman Zvagelsky
Frederik Mayer
Dominik Beutel
Carsten Rockstuhl
Guillaume Gomard
Martin Wegener
author_facet Roman Zvagelsky
Frederik Mayer
Dominik Beutel
Carsten Rockstuhl
Guillaume Gomard
Martin Wegener
author_sort Roman Zvagelsky
collection DOAJ
description In recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures, that is, using ex-situ approaches. In contrast, in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures. Along these lines, we present and characterise a Fourier-domain optical coherence tomography (FD-OCT) system that can be readily integrated into an existing 3D laser lithography setup. We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist. In such samples, local reflectivity arises from the (refractive-index) contrasts between the polymerised and non-polymerised regions. Thus, the refractive index of the printed material can be extracted. Furthermore, we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing. Supported by transfer-matrix calculations, we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix. Finally, we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.
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spelling doaj.art-5f83479820c04507a8c434818c1e99532022-12-22T03:49:03ZengLight Publishing GroupLight: Advanced Manufacturing2689-96202022-06-013211510.37188/lam.2022.039Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomographyRoman Zvagelsky0https://orcid.org/0000-0001-9435-2477Frederik Mayer1Dominik Beutel2Carsten RockstuhlGuillaume Gomard3Martin WegenerInstitute of Applied Physics (APH), Karlsruhe Institute of Technology (KIT), 76131 Karlsruhe, GermanyInstitute of Applied Physics (APH), Karlsruhe Institute of Technology (KIT), 76131 Karlsruhe, GermanyInstitute of Theoretical Solid State Physics (TFP), Karlsruhe Institute of Technology (KIT), 76131 Karlsruhe, GermanyCarl Zeiss AG, Zeiss Innovation Hub, Hermann-von-Helmholtz-Platz 6, 76344 Eggenstein-Leopoldshafen, GermanyIn recent years, multi-photon 3D laser printing has become a widely used tool for the fabrication of micro- and nanostructures for a large variety of applications. Typically, thorough sample characterisation is key for an efficient optimisation of the printing process. To date, three-dimensional microscopic inspection has usually been carried out on finished 3D printed microstructures, that is, using ex-situ approaches. In contrast, in-situ 3D characterization tools are desirable for quickly assessing the quality and properties of 3D printed microstructures. Along these lines, we present and characterise a Fourier-domain optical coherence tomography (FD-OCT) system that can be readily integrated into an existing 3D laser lithography setup. We demonstrate its capabilities by examining different 3D printed polymer microstructures immersed in a liquid photoresist. In such samples, local reflectivity arises from the (refractive-index) contrasts between the polymerised and non-polymerised regions. Thus, the refractive index of the printed material can be extracted. Furthermore, we demonstrate that the reflectivity of polymer-monomer transitions exhibits time-dependent behaviour after printing. Supported by transfer-matrix calculations, we explain this effect in terms of the time-dependent graded-index transition originating from monomer diffusion into the polymer matrix. Finally, we show exemplary 3D reconstructions of printed structures that can be readily compared with 3D computer designs.https://www.light-am.com/article/doi/10.37188/lam.2022.039multi-photon 3d laser printingoptical coherence tomographyin-situ diagnostics
spellingShingle Roman Zvagelsky
Frederik Mayer
Dominik Beutel
Carsten Rockstuhl
Guillaume Gomard
Martin Wegener
Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
Light: Advanced Manufacturing
multi-photon 3d laser printing
optical coherence tomography
in-situ diagnostics
title Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
title_full Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
title_fullStr Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
title_full_unstemmed Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
title_short Towards in-situ diagnostics of multi-photon 3D laser printing using optical coherence tomography
title_sort towards in situ diagnostics of multi photon 3d laser printing using optical coherence tomography
topic multi-photon 3d laser printing
optical coherence tomography
in-situ diagnostics
url https://www.light-am.com/article/doi/10.37188/lam.2022.039
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