| Summary: | Recently, hydrogen (H<sub>2</sub>) energy has attracted attention among eco-friendly energy sources because H<sub>2</sub> energy is eco-friendly, energy-efficient, and abundant in nature. However, when the concentration of H<sub>2</sub> in the atmosphere is more than 4%, H<sub>2</sub> has a risk of explosion. H<sub>2</sub> is a colorless, tasteless, and odorless gas that is difficult to detect with human senses. Therefore, developing an optimized hydrogen sensor is essential. Palladium (Pd) has good reactivity to hydrogen. Molybdenum disulfide (MoS<sub>2</sub>) has high carrier mobility, sensitive reactivity to toxic gases, and high surface-area-to-volume ratio. Therefore, we proposed hydrogen sensors that use Pd and MoS<sub>2</sub>. The main fabrication processes include MoS<sub>2</sub> deposition through CVD and Pd deposition through DC sputtering. In this study, we utilized Pd and MoS<sub>2</sub> to enable sensing at room temperature. By optimizing the Pd to a nanoparticle structure with an expansive surface area of 4 nm, we achieved a fast response time of 4–5 s and an enhanced yield through a simplified structure. Hydrogen sensors inherently exhibit sensitivity to various environmental factors. To address these challenges, technologies such as machine learning can be incorporated. Emphasizing low-power consumption and various application compatibilities becomes pivotal to promoting commercialization across diverse industries.
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