Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology
The extraction of <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> piezoelectric charge constant versus applied voltage profiles play an important role in the design of tunable RF devices and circuits. Lead zirconate titana...
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| Format: | Article |
| Language: | English |
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IEEE
2023-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/10184304/ |
| _version_ | 1797772590365802496 |
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| author | Limna S. Attoor Mahmoud Al Ahmad |
| author_facet | Limna S. Attoor Mahmoud Al Ahmad |
| author_sort | Limna S. Attoor |
| collection | DOAJ |
| description | The extraction of <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> piezoelectric charge constant versus applied voltage profiles play an important role in the design of tunable RF devices and circuits. Lead zirconate titanate (PZT) piezoelectric materials exhibit high piezoelectric constants and lightweight properties, which makes them promising candidates for high-performance smart RF-based tunable structures. Therefore, there is a need for characterizing piezoelectric materials relevant to their applications to predict their response during such operations. In this work, a combined electrical and light-based methodology to characterize the voltage dependency profile of <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> is developed. A set of equations are extracted based on the electrical capacitance and light profilometer analysis. These equations are then used to compute the effective <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> numerical values. PZT thin film of <inline-formula> <tex-math notation="LaTeX">$1~\mu \text{m}$ </tex-math></inline-formula> has been sandwiched between two electrodes and poled with the application of 20 volts/ <inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> to demonstrate the power of the current approach. The voltage-based capacitance and change in area of the sample were collected at different DC biases. The numerical values obtained by the existing conventional methods lie in the computed range obtained by the current technique. It is worth adding that it is quite difficult to absolutely decide which method produces the most representative numerical values due to the substrate clamping effect, probing, resolutions, and accuracy. |
| first_indexed | 2024-03-12T21:53:07Z |
| format | Article |
| id | doaj.art-5fa6da03481541538d9bd8361eda26bd |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-03-12T21:53:07Z |
| publishDate | 2023-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-5fa6da03481541538d9bd8361eda26bd2023-07-25T23:00:45ZengIEEEIEEE Access2169-35362023-01-0111746717467510.1109/ACCESS.2023.329578410184304Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based MethodologyLimna S. Attoor0https://orcid.org/0000-0003-1072-083XMahmoud Al Ahmad1https://orcid.org/0000-0003-1243-5207Electrical Engineering Department, United Arab Emirates University, Al Ain, United Arab EmiratesElectrical Engineering Department, United Arab Emirates University, Al Ain, United Arab EmiratesThe extraction of <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> piezoelectric charge constant versus applied voltage profiles play an important role in the design of tunable RF devices and circuits. Lead zirconate titanate (PZT) piezoelectric materials exhibit high piezoelectric constants and lightweight properties, which makes them promising candidates for high-performance smart RF-based tunable structures. Therefore, there is a need for characterizing piezoelectric materials relevant to their applications to predict their response during such operations. In this work, a combined electrical and light-based methodology to characterize the voltage dependency profile of <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> is developed. A set of equations are extracted based on the electrical capacitance and light profilometer analysis. These equations are then used to compute the effective <inline-formula> <tex-math notation="LaTeX">$\mathrm {d}_{33}$ </tex-math></inline-formula> numerical values. PZT thin film of <inline-formula> <tex-math notation="LaTeX">$1~\mu \text{m}$ </tex-math></inline-formula> has been sandwiched between two electrodes and poled with the application of 20 volts/ <inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> to demonstrate the power of the current approach. The voltage-based capacitance and change in area of the sample were collected at different DC biases. The numerical values obtained by the existing conventional methods lie in the computed range obtained by the current technique. It is worth adding that it is quite difficult to absolutely decide which method produces the most representative numerical values due to the substrate clamping effect, probing, resolutions, and accuracy.https://ieeexplore.ieee.org/document/10184304/Characterizationselectrical capacitancelight measurementsMEMSpiezoelectric coefficientPZT |
| spellingShingle | Limna S. Attoor Mahmoud Al Ahmad Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology IEEE Access Characterizations electrical capacitance light measurements MEMS piezoelectric coefficient PZT |
| title | Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology |
| title_full | Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology |
| title_fullStr | Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology |
| title_full_unstemmed | Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology |
| title_short | Piezoelectric Coefficient Characterization Using Combined Electrical and Light-Based Methodology |
| title_sort | piezoelectric coefficient characterization using combined electrical and light based methodology |
| topic | Characterizations electrical capacitance light measurements MEMS piezoelectric coefficient PZT |
| url | https://ieeexplore.ieee.org/document/10184304/ |
| work_keys_str_mv | AT limnasattoor piezoelectriccoefficientcharacterizationusingcombinedelectricalandlightbasedmethodology AT mahmoudalahmad piezoelectriccoefficientcharacterizationusingcombinedelectricalandlightbasedmethodology |