Selective formation of tungsten nanowires
<p>Abstract</p> <p>We report on a process for fabricating self-aligned tungsten (W) nanowires with polycrystalline silicon core. Tungsten nanowires as thin as 10 nm were formed by utilizing polysilicon sidewall transfer technology followed by selective deposition of tungsten by che...
Main Authors: | Bien Daniel, Saman Rahimah, Badaruddin Siti, Lee Hing |
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Format: | Article |
Language: | English |
Published: |
SpringerOpen
2011-01-01
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Series: | Nanoscale Research Letters |
Subjects: | |
Online Access: | http://www.nanoscalereslett.com/content/6/1/543 |
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