Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings
Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabricati...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2016-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | http://www.mdpi.com/1424-8220/16/7/1080 |