Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges
Graphene-based nanoelectromechanical systems (NEMS) have high future potential to realize sensitive mass and force sensors owing to graphene’s low mass density and exceptional mechanical properties. One of the important remaining issues in this field is how to achieve mechanical resonators with a hi...
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| Format: | Article |
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MDPI AG
2016-09-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/7/9/158 |
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| author | Makoto Takamura Hajime Okamoto Kazuaki Furukawa Hiroshi Yamaguchi Hiroki Hibino |
| author_facet | Makoto Takamura Hajime Okamoto Kazuaki Furukawa Hiroshi Yamaguchi Hiroki Hibino |
| author_sort | Makoto Takamura |
| collection | DOAJ |
| description | Graphene-based nanoelectromechanical systems (NEMS) have high future potential to realize sensitive mass and force sensors owing to graphene’s low mass density and exceptional mechanical properties. One of the important remaining issues in this field is how to achieve mechanical resonators with a high quality factor (Q). Energy dissipation in resonators decreases Q, and suppressing it is the key to realizing sensitive sensors. In this article, we review our recent work on energy dissipation in doubly-clamped and circular drumhead graphene resonators. We examined the temperature (T) dependence of the inverse of a quality factor ( Q - 1 ) to reveal what the dominant dissipation mechanism is. Our doubly-clamped trilayer resonators show a characteristic Q - 1 -T curve similar to that observed in monolayer resonators: Q - 1 ∝ T 2 above ∼100 K and ∝ T 0.3 below ∼100 K. By comparing our results with previous experimental and theoretical results, we determine that the T 2 and T 0.3 dependences can be attributed to tensile strain induced by clamping metals and vibrations at the free edges in doubly-clamped resonators, respectively. The Q - 1 -T curve in our circular drumhead resonators indicates that removing free edges and clamping metal suppresses energy dissipation in the resonators, resulting in a linear T dependence of Q - 1 in a wide temperature range. |
| first_indexed | 2024-04-13T11:33:56Z |
| format | Article |
| id | doaj.art-609a186adc0a4819ad3c2737b1404fc1 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-04-13T11:33:56Z |
| publishDate | 2016-09-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-609a186adc0a4819ad3c2737b1404fc12022-12-22T02:48:30ZengMDPI AGMicromachines2072-666X2016-09-017915810.3390/mi7090158mi7090158Energy Dissipation in Graphene Mechanical Resonators with and without Free EdgesMakoto Takamura0Hajime Okamoto1Kazuaki Furukawa2Hiroshi Yamaguchi3Hiroki Hibino4NTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, JapanNTT Basic Research Laboratories, NTT Corporation, 3-1 Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, JapanGraphene-based nanoelectromechanical systems (NEMS) have high future potential to realize sensitive mass and force sensors owing to graphene’s low mass density and exceptional mechanical properties. One of the important remaining issues in this field is how to achieve mechanical resonators with a high quality factor (Q). Energy dissipation in resonators decreases Q, and suppressing it is the key to realizing sensitive sensors. In this article, we review our recent work on energy dissipation in doubly-clamped and circular drumhead graphene resonators. We examined the temperature (T) dependence of the inverse of a quality factor ( Q - 1 ) to reveal what the dominant dissipation mechanism is. Our doubly-clamped trilayer resonators show a characteristic Q - 1 -T curve similar to that observed in monolayer resonators: Q - 1 ∝ T 2 above ∼100 K and ∝ T 0.3 below ∼100 K. By comparing our results with previous experimental and theoretical results, we determine that the T 2 and T 0.3 dependences can be attributed to tensile strain induced by clamping metals and vibrations at the free edges in doubly-clamped resonators, respectively. The Q - 1 -T curve in our circular drumhead resonators indicates that removing free edges and clamping metal suppresses energy dissipation in the resonators, resulting in a linear T dependence of Q - 1 in a wide temperature range.http://www.mdpi.com/2072-666X/7/9/158graphenenanoelectromechanical systems (NEMS)microelectromechanical systems (MEMS)hydrogen intercalationelectrochemical etchingenergy dissipation |
| spellingShingle | Makoto Takamura Hajime Okamoto Kazuaki Furukawa Hiroshi Yamaguchi Hiroki Hibino Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges Micromachines graphene nanoelectromechanical systems (NEMS) microelectromechanical systems (MEMS) hydrogen intercalation electrochemical etching energy dissipation |
| title | Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges |
| title_full | Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges |
| title_fullStr | Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges |
| title_full_unstemmed | Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges |
| title_short | Energy Dissipation in Graphene Mechanical Resonators with and without Free Edges |
| title_sort | energy dissipation in graphene mechanical resonators with and without free edges |
| topic | graphene nanoelectromechanical systems (NEMS) microelectromechanical systems (MEMS) hydrogen intercalation electrochemical etching energy dissipation |
| url | http://www.mdpi.com/2072-666X/7/9/158 |
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