Broadband THz Absorption of Microbolometer Array Integrated with Split-Ring Resonators
Abstract In this paper, a periodic structure based on metallic split-ring resonators is integrated into micro-bridge structures of THz microbolometer array to achieve high THz wave absorption in a wide frequency range. With a small unit size of 35 μm × 35 μm, the effect of split-ring structure on TH...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2020-12-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1186/s11671-020-03454-2 |
| Summary: | Abstract In this paper, a periodic structure based on metallic split-ring resonators is integrated into micro-bridge structures of THz microbolometer array to achieve high THz wave absorption in a wide frequency range. With a small unit size of 35 μm × 35 μm, the effect of split-ring structure on THz wave absorption characteristics of the multilayer structure array is studied to manipulate the resonance absorption frequencies. The absorption bandwidth is effectively increased by integrating a combined structure of split-ring and metallic disk. Broadband THz absorption is formed by coupling the absorption peaks of different structures. The periodic structure of dual-ring combined with a metallic disk provides a broadband THz wave absorption in the range of 4–7 THz. The highest absorption in the band reaches 90% and the lowest absorption is higher than 40%. The designed structure is process-compatible and easy to implement for small-pixel THz microbolometers with high absorption in a wide spectrum range. The research provides a scheme for broadband THz sensing and real-time imaging at room temperature. |
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| ISSN: | 1556-276X |