MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever
This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-02-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/4/1052 |
| _version_ | 1811298420545028096 |
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| author | Thanh-Vinh Nguyen Yuya Mizuki Takuya Tsukagoshi Tomoyuki Takahata Masaaki Ichiki Isao Shimoyama |
| author_facet | Thanh-Vinh Nguyen Yuya Mizuki Takuya Tsukagoshi Tomoyuki Takahata Masaaki Ichiki Isao Shimoyama |
| author_sort | Thanh-Vinh Nguyen |
| collection | DOAJ |
| description | This paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement. |
| first_indexed | 2024-04-13T06:20:00Z |
| format | Article |
| id | doaj.art-61bdbe1a968f48d08a0e504b80fd425e |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-13T06:20:00Z |
| publishDate | 2020-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-61bdbe1a968f48d08a0e504b80fd425e2022-12-22T02:58:42ZengMDPI AGSensors1424-82202020-02-01204105210.3390/s20041052s20041052MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive CantileverThanh-Vinh Nguyen0Yuya Mizuki1Takuya Tsukagoshi2Tomoyuki Takahata3Masaaki Ichiki4Isao Shimoyama5Sensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8564, JapanGraduate School of Information Science and Technology, The University of Tokyo, Tokyo 113-8656, JapanDepartment of Intelligent Robotics, Toyama Prefectural University, Toyama 939-0398, JapanGraduate School of Information Science and Technology, The University of Tokyo, Tokyo 113-8656, JapanSensing System Research Center, National Institute of Advanced Industrial Science and Technology (AIST), Ibaraki 305-8564, JapanDepartment of Intelligent Robotics, Toyama Prefectural University, Toyama 939-0398, JapanThis paper reports on a microelectromechanical systems (MEMS)-based sensor for pulse wave measurement. The sensor consists of an air chamber with a thin membrane and a 300-nm thick piezoresistive cantilever placed inside the chamber. When the membrane of the chamber is in contact with the skin above a vessel of a subject, the pulse wave of the subject causes the membrane to deform, leading to a change in the chamber pressure. This pressure change results in bending of the cantilever and change in the resistance of the cantilever, hence the pulse wave of the subject can be measured by monitoring the resistance of the cantilever. In this paper, we report the sensor design and fabrication, and demonstrate the measurement of the pulse wave using the fabricated sensor. Finally, measurement of the pulse wave velocity (PWV) is demonstrated by simultaneously measuring pulse waves at two points using the two fabricated sensor devices. Furthermore, the effect of breath holding on PWV is investigated. We showed that the proposed sensor can be used to continuously measure the PWV for each pulse, which indicates the possibility of using the sensor for continuous blood pressure measurement.https://www.mdpi.com/1424-8220/20/4/1052pulse wavepulse wave velocitymemspiezoresistivecantilever |
| spellingShingle | Thanh-Vinh Nguyen Yuya Mizuki Takuya Tsukagoshi Tomoyuki Takahata Masaaki Ichiki Isao Shimoyama MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever Sensors pulse wave pulse wave velocity mems piezoresistive cantilever |
| title | MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever |
| title_full | MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever |
| title_fullStr | MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever |
| title_full_unstemmed | MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever |
| title_short | MEMS-Based Pulse Wave Sensor Utilizing a Piezoresistive Cantilever |
| title_sort | mems based pulse wave sensor utilizing a piezoresistive cantilever |
| topic | pulse wave pulse wave velocity mems piezoresistive cantilever |
| url | https://www.mdpi.com/1424-8220/20/4/1052 |
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