Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications
We report the optimized wafer-scale fabrication of microporous membranes for applications in the biomedical field such as cell filtration. Existing similar devices can mostly not be integrated on CMOS circuits or mass fabricated. Both is enabled here by the exclusive use of scalable and low temperat...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2023-09-01
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| Series: | Current Directions in Biomedical Engineering |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/cdbme-2023-1110 |