Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications

Fabrication and characterization of CMOS-compatible perforated micromembranes for biomedical applications

We report the optimized wafer-scale fabrication of microporous membranes for applications in the biomedical field such as cell filtration. Existing similar devices can mostly not be integrated on CMOS circuits or mass fabricated. Both is enabled here by the exclusive use of scalable and low temperat...

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Bibliographic Details
Main Authors: Brechmann Noah, Michel Marvin, Bola Alina, Renz Franziska, Pickhinke Andreas, Seidl Karsten
Format: Article
Language:English
Published: De Gruyter 2023-09-01
Series:Current Directions in Biomedical Engineering
Subjects:
micromembrane
microperforation
microfluidics
filtration
Online Access:https://doi.org/10.1515/cdbme-2023-1110

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