Lithography Hotspot Detection Method Based on Transfer Learning Using Pre-Trained Deep Convolutional Neural Network

Lithography Hotspot Detection Method Based on Transfer Learning Using Pre-Trained Deep Convolutional Neural Network

As the designed feature size of integrated circuits (ICs) continues to shrink, the lithographic printability of the design has become one of the important issues in IC design and manufacturing. There are patterns that cause lithography hotspots in the IC layout. Hotspot detection affects the turn-ar...

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Bibliographic Details
Main Authors: Lufeng Liao, Sikun Li, Yongqiang Che, Weijie Shi, Xiangzhao Wang
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Series:Applied Sciences
Subjects:
hotspot detection
optical lithography
transfer learning
convolutional neural network
Online Access:https://www.mdpi.com/2076-3417/12/4/2192

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https://www.mdpi.com/2076-3417/12/4/2192

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