THERMAL OXIDATION AS A METHOD OF FORMATION OF NANOSCALE FUNCTIONAL FILMS ON AIIIBV SEMICONDUCTORS: CHEMOSTIMULATED INFLUENCE OF METAL OXIDES OVERVIEW
The use of oxides as chemostimulators of AIIIBV thermal oxidation alters the mechanism of the process of thermal oxidation of semiconductors from its own to that of transit or catalytic. The mechanism of the process is determined by the chemical nature of the oxide-chemostimulator and the way it is...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Voronezh State University
2018-06-01
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| Series: | Конденсированные среды и межфазные границы |
| Subjects: |