High Tunable BaTi<sub>x</sub>Zr<sub>1-x</sub>O<sub>3</sub> Films on Dielectric Substrate for Microwave Applications

High Tunable BaTi<sub>x</sub>Zr<sub>1-x</sub>O<sub>3</sub> Films on Dielectric Substrate for Microwave Applications

In this study, the structural and microwave properties of BaTiZrO<sub>3</sub> films deposited on alumina substrate were investigated. The films were deposited by RF magnetron sputtering in Ar/O<sub>2</sub> ambient atmosphere. The research of the island films at the initial st...

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Bibliographic Details
Main Authors:	Andrei Tumarkin, Evgeny Sapego, Alexander Gagarin, Artem Karamov
Format:	Article
Language:	English
Published:	MDPI AG 2022-09-01
Series:	Molecules
Subjects:	barium titanate–zirconate rf magnetron sputtering initial stages of growth microwave properties
Online Access:	https://www.mdpi.com/1420-3049/27/18/6086

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