Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects

Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects

Metal interconnects with a vertical wavy structure have been studied to realize high-density and low-electric-resistance stretchable interconnects. This study proposed a new method for fabricating vertical wavy structured metal interconnects that comprises the pre-stretch method and the micro-corrug...

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Bibliographic Details
Main Authors: Michitaka Yamamoto, Shinji Okuda, Seiichi Takamatsu, Toshihiro Itoh
Format: Article
Language:English
Published: MDPI AG 2022-07-01
Series:Micromachines
Subjects:
stretchable interconnects
Cu foil
micro-corrugation process
pre-stretch method
Online Access:https://www.mdpi.com/2072-666X/13/8/1210

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