A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors

Micro-opto-electro-mechanical (MOEMS) micromirrors are an enabling technology for mobile image projectors (pico-projectors). Low size and low power are the crucial pico-projector constraints. In this work, we present a fast method for the optimization of a silicon single-axis electromagnetic torsion...

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Bibliographic Details
Main Authors: Francesco Pieri, Alessandro Cilea
Format: Article
Language:English
Published: MDPI AG 2017-12-01
Series:Micromachines
Subjects:
Micro-electro-mechanical systems (MEMS)
MOEMS
micromirrors
multiobjective optimization
pico-projectors
magnetic actuation
Online Access:https://www.mdpi.com/2072-666X/9/1/2

Internet

https://www.mdpi.com/2072-666X/9/1/2

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