A Fast Multiobjective Optimization Strategy for Single-Axis Electromagnetic MOEMS Micromirrors
Micro-opto-electro-mechanical (MOEMS) micromirrors are an enabling technology for mobile image projectors (pico-projectors). Low size and low power are the crucial pico-projector constraints. In this work, we present a fast method for the optimization of a silicon single-axis electromagnetic torsion...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2017-12-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/9/1/2 |