The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing
In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It wa...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-09-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/9/1101 |
| _version_ | 1797518148479483904 |
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| author | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin |
| author_facet | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin |
| author_sort | Siti Aisyah Zawawi |
| collection | DOAJ |
| description | In this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses. |
| first_indexed | 2024-03-10T07:26:06Z |
| format | Article |
| id | doaj.art-64c4a5b083a241e49dd79002b22674ee |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T07:26:06Z |
| publishDate | 2021-09-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-64c4a5b083a241e49dd79002b22674ee2023-11-22T14:16:37ZengMDPI AGMicromachines2072-666X2021-09-01129110110.3390/mi12091101The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic SensingSiti Aisyah Zawawi0Azrul Azlan Hamzah1Burhanuddin Yeop Majlis2Faisal Mohd-Yasin3Institute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, MalaysiaInstitute of Microengineering and Nanoelectronics, Universiti Kebangsaan Malaysia, Bangi 43600, Selangor, MalaysiaQueensland Micro- and Nanotechnology Centre, Griffith University, Nathan, QLD 4111, AustraliaIn this study, 550 nm thick cubic silicon carbide square diaphragms were back etched from Si substrate. Then, indentation was carried out to samples with varying dimensions, indentation locations, and loads. The influence of three parameters is documented by analyzing load-displacement curves. It was found that diaphragms with bigger area, indented at the edge, and low load demonstrated almost elastic behaviour. Furthermore, two samples burst and one of them displayed pop-in behaviour, which we determine is due to plastic deformation. Based on optimum dimension and load, we calculate maximum pressure for elastic diaphragms. This pressure is sufficient for cubic silicon carbide diaphragms to be used as acoustic sensors to detect poisonous gasses.https://www.mdpi.com/2072-666X/12/9/1101indentationsilicon carbidediaphragmload-displacement curvemicrophone |
| spellingShingle | Siti Aisyah Zawawi Azrul Azlan Hamzah Burhanuddin Yeop Majlis Faisal Mohd-Yasin The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing Micromachines indentation silicon carbide diaphragm load-displacement curve microphone |
| title | The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing |
| title_full | The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing |
| title_fullStr | The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing |
| title_full_unstemmed | The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing |
| title_short | The Fabrication and Indentation of Cubic Silicon Carbide Diaphragm for Acoustic Sensing |
| title_sort | fabrication and indentation of cubic silicon carbide diaphragm for acoustic sensing |
| topic | indentation silicon carbide diaphragm load-displacement curve microphone |
| url | https://www.mdpi.com/2072-666X/12/9/1101 |
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