Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape
Tungsten has been commonly used for fine interconnects due to its good gap-filling characteristics in 3D molds, such as trench patterns. However, tungsten shows high deposition stress. This causes mold distortion because tungsten has low ad-atom mobility, and diffusion-driven relaxation does not occ...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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IEEE
2022-01-01
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| Series: | IEEE Access |
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| Online Access: | https://ieeexplore.ieee.org/document/9893796/ |
| _version_ | 1798000187158822912 |
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| author | Jong-Sung Lee Suncheul Kim Donghoon Han Myoung-Gyu Lee Young-Chang Joo |
| author_facet | Jong-Sung Lee Suncheul Kim Donghoon Han Myoung-Gyu Lee Young-Chang Joo |
| author_sort | Jong-Sung Lee |
| collection | DOAJ |
| description | Tungsten has been commonly used for fine interconnects due to its good gap-filling characteristics in 3D molds, such as trench patterns. However, tungsten shows high deposition stress. This causes mold distortion because tungsten has low ad-atom mobility, and diffusion-driven relaxation does not occur. To reduce tungsten’s deposition stress, the shape of the nuclei can be controlled, which is an effective way to suppress the mechanical deformation caused by the formation of a grain boundary between free surfaces during the coalescence stage. In this study, elliptical tungsten nuclei with various aspect ratios, which suppress coalescence in the early stage of deposition, were proposed to reduce the deposition stress. Stress was calculated using the finite element method (FEM) in the range of 0.5 to 8 radius ratios of the tungsten nuclei. The bending of the trench mold was calculated due to tungsten stress and additional coalescence between films during the filling process. As a result, the wider the elliptical nucleus was, the lower the film stress, and mold bending between line patterns was also reduced. The defects in the depth and width of the periodic trench influenced the mold bending in the early growth stage and the stage of coalescence between films, respectively. |
| first_indexed | 2024-04-11T11:16:10Z |
| format | Article |
| id | doaj.art-6520f853cd46442eab2ca975679cee4d |
| institution | Directory Open Access Journal |
| issn | 2169-3536 |
| language | English |
| last_indexed | 2024-04-11T11:16:10Z |
| publishDate | 2022-01-01 |
| publisher | IEEE |
| record_format | Article |
| series | IEEE Access |
| spelling | doaj.art-6520f853cd46442eab2ca975679cee4d2022-12-22T04:27:14ZengIEEEIEEE Access2169-35362022-01-011010067510068110.1109/ACCESS.2022.32072849893796Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei ShapeJong-Sung Lee0Suncheul Kim1Donghoon Han2Myoung-Gyu Lee3Young-Chang Joo4https://orcid.org/0000-0003-2562-375XDepartment of Materials Science & Engineering, Seoul National University, Gwanak-gu, Seoul, South KoreaSamsung Electronics Company Ltd., Hwaseong-si, South KoreaSamsung Electronics Company Ltd., Hwaseong-si, South KoreaDepartment of Materials Science & Engineering, Seoul National University, Gwanak-gu, Seoul, South KoreaDepartment of Materials Science & Engineering, Seoul National University, Gwanak-gu, Seoul, South KoreaTungsten has been commonly used for fine interconnects due to its good gap-filling characteristics in 3D molds, such as trench patterns. However, tungsten shows high deposition stress. This causes mold distortion because tungsten has low ad-atom mobility, and diffusion-driven relaxation does not occur. To reduce tungsten’s deposition stress, the shape of the nuclei can be controlled, which is an effective way to suppress the mechanical deformation caused by the formation of a grain boundary between free surfaces during the coalescence stage. In this study, elliptical tungsten nuclei with various aspect ratios, which suppress coalescence in the early stage of deposition, were proposed to reduce the deposition stress. Stress was calculated using the finite element method (FEM) in the range of 0.5 to 8 radius ratios of the tungsten nuclei. The bending of the trench mold was calculated due to tungsten stress and additional coalescence between films during the filling process. As a result, the wider the elliptical nucleus was, the lower the film stress, and mold bending between line patterns was also reduced. The defects in the depth and width of the periodic trench influenced the mold bending in the early growth stage and the stage of coalescence between films, respectively.https://ieeexplore.ieee.org/document/9893796/Finite element analysismetallizationstressthin filmstungsten |
| spellingShingle | Jong-Sung Lee Suncheul Kim Donghoon Han Myoung-Gyu Lee Young-Chang Joo Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape IEEE Access Finite element analysis metallization stress thin films tungsten |
| title | Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape |
| title_full | Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape |
| title_fullStr | Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape |
| title_full_unstemmed | Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape |
| title_short | Stress Analysis of Tungsten Deposition in a 3D Trench Mold With Regard to Initial Nuclei Shape |
| title_sort | stress analysis of tungsten deposition in a 3d trench mold with regard to initial nuclei shape |
| topic | Finite element analysis metallization stress thin films tungsten |
| url | https://ieeexplore.ieee.org/document/9893796/ |
| work_keys_str_mv | AT jongsunglee stressanalysisoftungstendepositionina3dtrenchmoldwithregardtoinitialnucleishape AT suncheulkim stressanalysisoftungstendepositionina3dtrenchmoldwithregardtoinitialnucleishape AT donghoonhan stressanalysisoftungstendepositionina3dtrenchmoldwithregardtoinitialnucleishape AT myounggyulee stressanalysisoftungstendepositionina3dtrenchmoldwithregardtoinitialnucleishape AT youngchangjoo stressanalysisoftungstendepositionina3dtrenchmoldwithregardtoinitialnucleishape |