Integrated Amorphous Silicon p-i-n Temperature Sensor for CMOS Photonics
Hydrogenated amorphous silicon (a-Si:H) shows interesting optoelectronic and technological properties that make it suitable for the fabrication of passive and active micro-photonic devices, compatible moreover with standard microelectronic devices on a microchip. A temperature sensor based on a hydr...
Main Authors: | Sandro Rao, Giovanni Pangallo, Francesco Giuseppe Della Corte |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2016-01-01
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Series: | Sensors |
Subjects: | |
Online Access: | http://www.mdpi.com/1424-8220/16/1/67 |
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