System level simulation and fabrication of SOI-MEMS differential Capacitive accelerometer

System level simulation and fabrication of SOI-MEMS differential Capacitive accelerometer

This study primarily covers the design and development of an MEMS based accelerometer. Frequency, displacement sensitivity, and capacitance are the subject of analytical modelling; the corresponding values are found to be 7.41kHz, 4.5096∗10−9 m/g, and 0.289pF respectively. COMSOL Multiphysics is use...

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Bibliographic Details
Main Authors: Veena.S, H.L Suresh, Newton Rai, Veerapandi N, Veda Sandeep Nagaraj
Format: Article
Language:English
Published: Tamkang University Press 2024-01-01
Series:Journal of Applied Science and Engineering
Subjects:
mems capacitive accelerometer
comsol
soi mumps
fabrication
characterisation
sensitivity
Online Access:http://jase.tku.edu.tw/articles/jase-202403-27-3-0012

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