Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

Nanomaterials Based Micro/Nanoelectromechanical System (MEMS and NEMS) Devices

The micro- and nanoelectromechanical system (MEMS and NEMS) devices based on two-dimensional (2D) materials reveal novel functionalities and higher sensitivity compared to their silicon-base counterparts. Unique properties of 2D materials boost the demand for 2D material-based nanoelectromechanical...

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Bibliographic Details
Main Authors: Ziba Torkashvand, Farzaneh Shayeganfar, Ali Ramazani
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Micromachines
Subjects:
micro-electromechanical systems
nanoelectromechanical systems
two-dimensional (2D) materials
sensors
accelerometers
microphones
Online Access:https://www.mdpi.com/2072-666X/15/2/175

Internet

https://www.mdpi.com/2072-666X/15/2/175

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